Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature

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Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature

Classification of the Categories of Amorphous Hydrogenated Silicon Oxynitride Films Using Infrared Spectroscopy

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PDF] Diffusion of Water Molecules in Amorphous Silica

Conformal growth and characterization of hafnium silicate thin film by MOCVD using HTB (hafnium tertra-tert-butoxide) and TDEAS (tetrakis-diethylamino silane)

PDF) Rapid Reversible Degradation of Silicon Thin Films by a Treatment in Water

PDF) Oxidation processes in hydrogenated amorphous silicon nitride films deposited by ArF laser-induced CVD at low temperatures

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Classification of the Categories of Amorphous Hydrogenated Silicon Oxynitride Films Using Infrared Spectroscopy

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PDF) Chemical and morphological properties of amorphous silicon oxynitride films deposited by plasma enhanced chemical vapor deposition

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