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Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes

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PDF] 100K Q-factor toroidal ring gyroscope implemented in wafer-level epitaxial silicon encapsulation process

PDF) Multi-Coefficient Eigenmode Operation – Breaking Through 10°/hr Open-Loop Bias Instability in Wideband Aluminum Nitride Piezoelectric BAW Gyroscopes

PDF) Multi-Coefficient Eigenmode Operation – Breaking Through 10°/hr Open-Loop Bias Instability in Wideband Aluminum Nitride Piezoelectric BAW Gyroscopes

Research articles Microsystems & Nanoengineering

The development of micromachined gyroscope structure and circuitry technology. - Abstract - Europe PMC

A 0.5MHz mode-matched pitch or roll annulus gyroscope with nano-gap slanted electrodes for quadrature cancellation

Figure 3 from Eigenmode operation as a quadrature error cancellation technique for piezoelectric resonant gyroscopes

Substrate-decoupled, bulk-acoustic wave gyroscopes: Design and evaluation of next-generation environmentally robust devices

SED distribution for the second elliptical in-plane mode of the

Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes

Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes

PDF) Multi-Coefficient Eigenmode Operation – Breaking Through 10°/hr Open-Loop Bias Instability in Wideband Aluminum Nitride Piezoelectric BAW Gyroscopes

Eigenmode operation of piezoelectric resonant gyroscopes

Substrate-decoupled, bulk-acoustic wave gyroscopes: Design and evaluation of next-generation environmentally robust devices. - Abstract - Europe PMC

A 0.5MHz mode-matched pitch or roll annulus gyroscope with nano-gap slanted electrodes for quadrature cancellation